Patent holdings for IPC class H01J 37/04

Total number of patents in this class: 560

10-year publication summary

51
46
46
41
55
40
51
38
45
14
2015 2016 2017 2018 2019 2020 2021 2022 2023 2024

Principal owners for this class

Owner
All patents
This class
NuFlare Technology, Inc.
770
97
ASML Netherlands B.V.
6816
61
Hitachi High-Tech Corporation
4424
31
Hitachi High-Technologies Corporation
2034
27
FEI Company
851
24
Mapper Lithography IP B.V.
136
19
Applied Materials, Inc.
16587
15
Intel Corporation
45621
10
Carl Zeiss Microscopy GmbH
1146
9
Hitachi, Ltd.
16452
8
Varian Semiconductor Equipment Associates, Inc.
1282
8
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
149
8
IMS Nanofabrication GmbH
56
8
JEOL Ltd.
556
8
KLA Corporation
1223
8
Carl Zeiss MultiSEM GmbH
85
8
Lam Research Corporation
4775
7
Axcelis Technologies, Inc.
429
7
KLA-Tencor Corporation
2574
7
Applied Materials Israel, Ltd.
549
6
Other owners 184